| Diameter | 2" | 3" | 4" | 5" | 6" | 8" | 12" |
| Grade | Prime | ||||||
| Growth Method | CZ | ||||||
| Orientation | <1-0-0>,<1-1-1>,<1-1-0> | ||||||
| Type/Dopant | P Type/Boron,N Type/Phos,N Type/As,N Type/Sb | ||||||
| Thichness (um) | 279 | 380 | 525 | 625 | 675 | 725 | 775 |
| Thichness Tolerance | Standard ±25um, Maximum Capabilities ±5um | ± 20um | ± 20um | ||||
| Resistivity | 0.001-100 ohm-cm | ||||||
| Surface Finished | P/E,P/P,E/E,G/G | ||||||
| TTV (um) | Standard < 10um, Maximum Capabilities < 5um | ||||||
| Bow/Warp (um) | Standard < 40um, Maximum Capabilities < 20um | <40um | <40um | ||||
| Particle | <10@0.5um; <10@0.3um; <10@0.2um | ||||||
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